(Thermal Stability of B-C-N Thin Films Fabricated by Magnetron Sputtering Using Graphite and BN Co-Target)
8th International Symposium on Sputtering & Plasma Processes. 2005.
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Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2017-02-14 10:54:54 +0900更新時刻: 2017-07-10 19:39:28 +0900