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低圧誘導結合CH4/H2プラズマにおける非弾性過程
(Inelastic Processes in a Low Pressure Inductively Coupled CH4/H2 Plasma)
第54回応用物理学関係連合講演会. March 27, 2007-March 30, 2007.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:34:07 +0900 Updated at: 2017-07-10 19:54:02 +0900