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Siナノ結晶を含むSi熱酸化膜及びSiO2/Si界面での重水素挙動
(Behavior of deuterium atoms in thermally oxidized SiO2 layer containing silicon nanocrystals and at Si/ SiO2 interface)
2008年秋季 第69回応用物理学会学術講演会. September 02, 2008-September 05, 2008.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:33:45 +0900 Updated at: 2017-07-10 20:16:00 +0900