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Si熱酸化膜中及びSiO2/Si界面での重水素挙動
(Behavior of deuterium atoms in thermally oxidized SiO2 layer and at Si/ SiO2 interface)
春季第55回応用物理学会学術講演会. March 27, 2008-March 30, 2008.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:56:53 +0900 Updated at: 2017-07-10 20:09:03 +0900