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Micro- and Nano-structural Patterning with Ion Implantation Using Stencil Masks and Perturbation Methods
(ステンシルマスクと摂動法を用いたイオン注入によるマイクロ及びナノパターンニング)
16th Int. Conf. on Ion Beam Modification of Materials, IBMM2008. August 31, 2008-September 05, 2008.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:23:44 +0900 Updated at: 2017-07-10 20:17:59 +0900