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AlN 薄膜中の窒素イオンの拡散
(Nitrogen diffusion in AlN thin film)
2010年度セラミックス総合研究会. September 02, 2010-September 03, 2010. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:14:08 +0900 Updated at: 2024-03-05 11:43:06 +0900