HOME > Presentation > DetailFormation of Isotopically Controlled Si Films from Fluoro-SilaneSUZUKI, Hiroshi. The 10th International Symposium on Advanced Physical Fields. March 07, 2005-March 10, 2005.NIMS author(s)SUZUKI, HiroshiFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2022-09-05 11:41:23 +0900Updated at: 2022-09-05 11:41:23 +0900