Material Selection for the Metal Gate/High-k Transistors

Y.Akasaka, K.Miyagawa, A.Kariya, H.Shoji, T.Aoyama, S.Kume, O.Ogawa, 白石賢二, 上殿明良, 山部紀久夫, 知京豊裕, 中島清美, M.Yasuhara, K.Yamada, T.Arikago.

solid State Device and Materials 2004. September 15, 2004-September 17, 2004.