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AuthorMasakazu Noro, TERAJI, Tokuyuki, Toshimichi Ito.
Title高出力マイクロ波プラズマCVD法における多結晶ダイヤモンド膜の高品質化
(Improvement in crystalline quality of poly-crystalline diamond films deposited by high-power microwave-plasma CVD)
Event name第19回ダイヤモンドシンポジウム
Year of publication2005
LanguageJapanese

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