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高出力マイクロ波プラズマCVD法における多結晶ダイヤモンド膜の高品質化
(Improvement in crystalline quality of poly-crystalline diamond films deposited by high-power microwave-plasma CVD)

野呂雅和, 寺地 徳之, 伊藤利道.
第19回ダイヤモンドシンポジウム. 2005.

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at :2017-01-08 04:38:13 +0900 Updated at :2017-07-10 19:30:34 +0900

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