HOME > Presentation > Detail
Numerical Simulation of Low Pressure Inductively Coupled Plasma Sources for Nanocrystalline Diamond Deposition
17th International Symposium on Plasma Chemistry (ISPC-17). August 07, 2005-August 12, 2005.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-05 11:42:41 +0900 Updated at: 2022-09-05 11:42:41 +0900