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Ultramicro Fabrications on Fe-Ni Alloys Using Electron-Beam Writing and Reactive-Ion Etching
(電子線描画法と反応性イオンエッチング法によるFe-Ni合金の超微細加工)
International Magnetic Conference 96. April 09, 1996-April 12, 1996.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:40:15 +0900 Updated at: 2023-04-09 15:03:31 +0900