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新機能性ＢＮ薄膜のレーザープラズマ・同期ＣＶＤ
(Laser-plasma synchronous CVD of new functional BN films)
5th EU-Japan Joint Symposium on Plasma Processing. March 07, 2007-March 09, 2007. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:21:09 +0900 Updated at: 2024-03-05 11:41:24 +0900