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低圧誘導結合CH4/H2プラズマの数値解析
(Numerical Simulation of Low Pressure Inductively Coupled CH4/H2 Plasma)
第65回応用物理学会学術講演会. September 01, 2004-September 04, 2004.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 03:42:14 +0900 Updated at: 2017-07-10 19:03:09 +0900