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Lu下地層導入によるScAlNのSc固溶量増大とミクロ組織改質
(Extending Sc solubility and modifying the microstructure of ScAlN by introducing a Lu buffer layer)
日本顕微鏡学会 第81回学術講演会. June 09, 2025-June 11, 2025.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2025-11-03 03:09:24 +0900 Updated at: 2025-11-03 03:09:24 +0900