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窒素同位体AlN多層膜中の窒素拡散
(Nitrogen ionic diffusivity in nitrogen-isotopic AlN multilayers)
日本セラミックス協会 2010年年会. March 22, 2010-March 24, 2010.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:52:54 +0900 Updated at: 2017-07-10 20:46:18 +0900