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Evaluation of irradiation-induced deep levels in Si
(Si中の照射損傷による深い準位の評価)

KONO, Kenichiro, Sandland J G, 和田一美, Kimerling L C.
SPIE 45th Annual Meeting (国際光学技術者連合第45回年大会). July 30, 2000-August 04, 2000.

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    Created at: 2022-09-05 11:03:38 +0900 Updated at: 2022-09-05 11:03:38 +0900

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