Control of Ge Nanowire Orientation in Selective-Area VLS Growth on Si (111)

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Shohei Okuda, Shuma Yuzawa, Michiharu Makino, JEVASUWAN, Wipakorn, FUKATA, Naoki, Shinjiro Hara.

2023 International Conference on Solid State Devices and Materials (SSDM2023). 2023.

作成時刻: 2023-11-16 03:15:53 +0900更新時刻: 2023-11-16 03:15:53 +0900