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低圧誘導結合型RFプラズマを用いるBF3からのc-BN膜合成
(Synthesis of c-BN films by using low-pressure inductively coupled rf plasma and BF3 gas)
2002年春季第49回応用物理学関係連合講演会. March 27, 2002-March 30, 2002.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 02:31:47 +0900 Updated at: 2017-07-10 18:22:29 +0900