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反応性RFスパッタリングによる窒素ドープSiナノ結晶の作製
(Fabrication of nitrogen-doped silicon nanoparticles by reactive RF sputtering)
E-MRS 2012 FALL MEETING. September 17, 2012-September 21, 2012.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:06:17 +0900Updated at: 2017-07-10 21:28:34 +0900