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低酸素GaNスパッタリングターゲットを用いた高結晶性GaNの作製と評価
(Fabrication and characterization of high quality sputtered GaN film by low oxygen GaN target)
第81回 応用物理学会 秋季学術講演会. September 08, 2020-September 11, 2020.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2020-12-09 03:00:18 +0900 Updated at: 2020-12-09 03:00:18 +0900