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ナノパターン重イオン注入における近隣効果
(Proximity Effects of Nano-patterned Heavy-Ion Implantation)
第19回日本MRS学術シンポジウム. December 07, 2009-December 09, 2009.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 05:42:17 +0900 Updated at: 2017-07-10 20:41:58 +0900