HOME > Presentation > DetailProximity Effect in Electron-Beam-Induced DepositionMITSUISHI, Kazutaka. 2005 International Microprocesses and Nanotechnology Conference. October 25, 2005-October 28, 2005.NIMS author(s)MITSUISHI, KazutakaFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2022-09-05 11:44:08 +0900Updated at: 2022-09-05 11:44:08 +0900