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Effect of Surface damage of Si nanostructures on SiC formation
秋季第85回応用物理学会秋季学術講演会. September 16, 2024-September 20, 2024.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2024-09-25 03:10:01 +0900 Updated at: 2024-09-25 03:10:01 +0900