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高速偏光解析によるSi表面酸化超薄膜成長速度の基板結晶方向依存.
(Crystal Orientation Dependence of Ultra Thin Oxie Film Growth on Si-Surface by a Rapid Ellipsometry.)
日本物理学会. October 12, 1993-October 15, 1993.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:25:24 +0900 Updated at: 2017-07-10 17:25:18 +0900