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HIGH-RATE GROWTH OF HIGH-QUALITY MICROCRYSTALLINE SILICON FILMS FROM PLASMA BY INTERCONNECTED MULTI-HOLLOW CATHODE
Fifth Asian-European International Conference on Plasma Surface . September 12, 2005-September 16, 2005. Invited
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Created at: 2022-09-05 11:44:05 +0900Updated at: 2024-03-05 11:40:47 +0900