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HVPEによるα-Ga2O3の選択横方向成長
(Epitaxial Lateral Overgrowth of α-Ga2O3 by Halide Vapor Phase Epitaxy)
60th Electronic Materials Conference (EMC). 2018.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2018-01-31 22:20:32 +0900Updated at: 2018-06-05 14:17:48 +0900