Self-aligned photolithography using backside exposure through metal patterns on β-Ga2O3 substrates
| 著者 | OSHIMA, Takayoshi. |
|---|---|
| 会議名 | The 4th International Workshop on Gallium Oxide and Related Materials |
| 発表年 | 2022 |
| 言語 | English |
| 著者 | OSHIMA, Takayoshi. |
|---|---|
| 会議名 | The 4th International Workshop on Gallium Oxide and Related Materials |
| 発表年 | 2022 |
| 言語 | English |