Depletion-mode r-GeO2 MOSFETs Fabricated by Selective Area Growth via Atmospheric Pressure Chemical Vapor Deposition with Ultrasonic Transducers

Kazuyoshi Norimatsu, OSHIMA, Takayoshi, Yuri Shimizu, Ai Kono, Shinpei Matsuda.

2026 International Conference on Solid State Devices and Materials (SSDM2026). September 14, 2026-September 17, 2026.

Created at: 2026-09-17 03:07:14 +0900 Updated at: 2026-09-17 03:07:14 +0900