Study of high-purity Titanium thin films with partially nitrided surfaces as a new nonevaporable getter by scanning transmission electron microscopy and electron energy loss spectroscopy

Masato Ono, Kazuo Yoshioka, Ichiro Yoshikawa, Kazuhiko Mase, Takashi Kikuchi, 山中操, 橋本綾子.

The 9th International Symposium on Surface ~Toward Sustainable Development~ (ISSS9). November 28, 2021-December 01, 2021.