HOME > Presentation > Detail
Siナノ結晶を含むSi酸化膜へのAlドーピング
(Si nanocrystal in Al-doped Si oxide film)
2006年春季第53回応用物理学関係連合講演会. March 22, 2006-March 26, 2006.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:23:01 +0900 Updated at: 2017-07-10 19:32:32 +0900