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SPring-8硬X線光電子分光によるメモリーデバイスの埋もれた界面化学反応の解明
(Investigation of chemical reaction at “buried” interface of memory device by hard X-ray photoelectron spectroscopy at SPring-8)
第69回応用物理学会学術講演会. September 02, 2008-September 05, 2008.
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Created at: 2017-02-14 11:16:29 +0900Updated at: 2017-07-10 20:21:25 +0900