HOME > Presentation > Detail電気めっきで作製したCuナノ配線の深さ方向TEM解析(Orientation of depth dependency in Cu wire for ULSI)石川 信博, 大貫仁. 日本金属学会平成22年度秋期講演大会. September 25, 2010-September 27, 2010.NIMS author(s)ISHIKAWA, NobuhiroFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-01-08 04:43:31 +0900Updated at: 2017-07-10 20:59:12 +0900