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Top-down Fabrication of Ge/Si core/shell Nanowire Channels for Vertical-type Field Effect Transistors
第70回応用物理学会春季学術講演会 The 70th JSAP Spring Meeting 2023. March 15, 2023-March 18, 2023.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2023-06-08 08:31:44 +0900 Updated at: 2023-06-08 08:31:44 +0900