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原子層堆積膜に埋め込んだ分子性酸化物
(Molecular oxide Embedded in Atomic Layer Deposition film)
新有機材料検討委員会. 2013-12-18. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 03:58:00 +0900Updated at: 2024-03-05 11:44:50 +0900