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二次イオン質量分析装置を用いた酸素注入GaNの酸素，窒素分析
(Independent analysis of oxygen and nitrogen in oxygen implanted GaN using secondary ion mass spectrometry)
第34回エレクトロセラミックス研究討論会. October 24, 2014-October 25, 2014.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:32:24 +0900 Updated at: 2017-07-10 21:59:58 +0900