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コンビナトリアル3元合成法による新規ゲート酸化膜探索とその評価
(Combinatorial ternary phase diagramming for discovery of New gate materials and their characterizations)
Electrical Material Conference (EMC 2003). June 25, 2003-June 27, 2003.
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Created at: 2017-02-14 11:05:19 +0900 Updated at: 2017-07-10 18:50:23 +0900