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(Numerical simulation of inductively coupled plasma sources for nanostructured carbon deposition)
APCPST-7(7th Asia Pacific Conference on Plasma Science and Techn. June 29, 2004-July 02, 2004.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-22 23:02:26 +0900 Updated at: 2017-07-10 19:01:26 +0900