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AuthorITAKURA, Akiko, GRINEVICH, Andrey, TodaMasaya, BergerRuediger.
Title自己集合膜を利用したストレスのパターニング
(Surface stress patterning using Self-Assembled Monolayer)
Event nameJST領域会議
Year of publication2007
LanguageJapanese
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