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Hf-Silicate膜の局所絶縁劣化現象のC-AFM観察
(Conductive Atomic Force Microscopy Study on Local Dielectric Degradation of)
平成17年度 春季応用物理学会. March 29, 2005-April 01, 2005.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:16:25 +0900 Updated at: 2017-07-10 19:14:09 +0900