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Numerical Study on Low Pressure Inductively Coupled Plasma Sources for Nanocrystalline Diamond Deposition
The 8th International Symposium on Sputtering & Plasma Processin. June 08, 2005-June 10, 2005.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-05 11:42:15 +0900 Updated at: 2022-09-05 11:42:15 +0900