HOME > 口頭発表 > 書誌詳細High purity indium oxide films prepared by modified ALD using liquid ethylcyclopentadienyl indiumFumikazu Mizutani, Shintaro Higashi, 生田目 俊秀. 17th International Conference on Atomic Layer Deposition. 2017.NIMS著者生田目 俊秀Materials Data Repository (MDR)上の本文・データセット作成時刻 :2017-02-26 21:20:59 +0900 更新時刻 :2017-07-10 22:36:17 +0900