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Characteristics of Broad-Band Frequency Low Pressure Inductively Coupled Plasma Used for Nanostructured Carbon Deposition
(微細構造炭素製膜用広帯域周波数低圧誘導結合プラズマの特性)
16th International Symposium on Plasma Chemistry. June 22, 2003-June 27, 2003.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-05 11:23:58 +0900 Updated at: 2022-09-05 11:23:58 +0900