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電子ビームのデポのリソグラフィーで亜１０ｎｍシリコンのナノ構造
(Sub-10 nm Silicon Nanostructures by EBID Lithography)
The International Conference on Nanophotonics 2010. May 30, 2010-June 03, 2010.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:03:44 +0900 Updated at: 2017-07-10 20:47:57 +0900