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低温熱酸化中におけるSi ナノワイヤ中のボロン、リン不純物の偏析挙動
(Segregation and interaction of boron and phosphorus impurities in silicon nanowires during low temperature ozone oxidation)
Nanowire 2014. 2014. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 03:36:20 +0900Updated at: 2024-03-05 11:45:16 +0900