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スクリプト制御FIB-SEM装置による自動３次元アトムプローブ試料作製技術の確立
(Automated tip preparation for 3D atom probe by script-controllable FIB-SEM system)
日本顕微鏡学会第79回学術講演会. June 26, 2023-June 28, 2023.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2023-09-14 03:21:26 +0900 Updated at: 2023-09-14 03:21:26 +0900