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デバイス応用に向けたα-Ga2O3二重ELO膜の平坦化
(Planarization in double-layered ELO α-Ga2O3 films for the device fabrication)
第81回応用物理学会秋季学術講演会. 2020.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2020-09-10 03:00:20 +0900Updated at: 2020-09-10 03:00:20 +0900