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4H-SiC Surface Structures and Oxidation Mechanism Revealed by Using First-Principles and Classical Molecular Dynamics Simulations
(第一原理および古典的分子動力学法を用いた4H-SiC構造の酸化機構の解明)
ICSCRM-2015. 2015.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-10-22 02:43:20 +0900Updated at: 2022-10-22 02:43:20 +0900