Zero-Length Conflat Fin-Type Nonevaporable Getter Pump Coated with Oxygen-Free Palladium/Titanium

Yuta Sato, 橋本綾子, 山中操, Takashi Kikuchi, Kazuhiko Mase, Tetsuya Miyazawa, Shinya Ohno.

11th International Conference on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation (MEDSI 2020). 2021.