HOME > Presentation > Detail
Trapping mechanism of charge trap capacitor with Al2O3/High-k/Al2O3 multilayer
ULSI vs. TFT6. May 21, 2017-May 25, 2017. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-10-22 02:46:28 +0900 Updated at: 2024-03-05 11:46:42 +0900