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光照射とポリシラザン塗布膜による高ガスバリア膜低温形成技術の開発
(Development of low temperature formation technology for high gas barrier film using photo irradiation and polysilazane coating method)
日本セラミックス協会 2017年会. March 17, 2017-March 19, 2017.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:26:34 +0900 Updated at: 2017-07-10 22:33:51 +0900